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Ultra-Thin Silicon Beam Lead Chips for Superconducting Terahertz Circuits
Ultra-Thin Silicon Beam Lead Chips for Superconducting Terahertz Circuits
2003
Robert B. Bass
Arthur W. Lichtenberger
Robert M. Weikle
Jacob W. Kooi
Christopher K. Walker
S.-K. Pan
Keywords:
Reactive-ion etching
Electronic circuit
Superconductivity
Silicon on insulator
Terahertz radiation
Electronic engineering
Beam (structure)
Silicon
Materials science
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