HTS Multilayer Process Development for Digital Circuits

Digital circuits based on High Temperature Superconductors (HTS) have the potential for offering operation at higher speed, and lower power dissipation than semiconductor circuits, while offering unprecedented performance advantages attributable to the unique quantum mechanical nature of the superconducting state. In order to fully realize this potential, it is necessary to develop a circuit process which integrates reproducible Josephson junctions into epitaxial multilayers. This paper discusses some of the materials and fabrication issues involved in the development of such a process.