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Fabrication of large-scale silicon nitride resonator by femtosecond laser
Fabrication of large-scale silicon nitride resonator by femtosecond laser
2020
Zuo Feng
He Yuming
Weihua Han
Zhaofeng Li
Keywords:
Fabrication
Resonator
Femtosecond
Optoelectronics
Silicon nitride
Laser
Materials science
Correction
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