High-resolution electron energy loss spectrometer for energy and momentum two-dimensional analyses

2011 
The invention provides an electron energy loss spectrometer for energy and momentum two-dimensional analyses and solves problems of high resolution and high signal intensity matching between an electron-beam source and an angle-resolution electron energy analyzer. The electron energy loss spectrometer comprises a flexible electron-beam source, an angle-resolution mode lens, an angle-resolution electron energy analyzer and the like. The angle-resolution electron energy analyzer can be used for analyzing a low-energy inelastic scattering electron beam of EELS (electron energy loss spectroscopy), flexibility and good monochromatization capability of the electron source, good parallel convergence capability to the electron beam of an angle-resolution mode lens system and the energy and momentum dual analytic capability of the angle-resolution electron energy analyzer are combined together, the momentum and the energy two-dimensional analyses of inelastic scattering electrons can be performed synchronously, and the electron energy loss spectrometer can be acquired, so that a measurement method is provided for accurately measuring complete information excited by surface elements.
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