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Ultra High Density HfO2 Nanodots Memory for Scaling
Ultra High Density HfO2 Nanodots Memory for Scaling
2006
Hironori Wakai
M. Kobayashi
Takaaki Kumise
Masaomi Yamaguchi
Toshiro Nakanishi
H Tanaka
Keywords:
Crystallization
Chemical vapor deposition
Hafnium oxide
Amorphous solid
Nanodot
Nanotechnology
Transistor
Analytical chemistry
Voltage
Materials science
Scaling
ultra high density
Optoelectronics
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