Estimating surface coverage of gold nanoparticles deposited on MEMS

Commercialization of a whole spectrum of useful MEMS is still hindered by surface phenomena that dominate at the micron scale. Altering the roughness and surface chemistry of MEMS surfaces by depositing nanoparticles on them is being considered by the MEMS community as a useful strategy to address tribological issues. Although, gold nanoparticle monolayer is reported to reduce adhesion in MEMS, determining its surface coverage still remains a challenge [1]. A technique to determine the surface coverage of deposited gold nanoparticles is needed, so that its effect on the tribology of MEMS surfaces can be studied.