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Improved Ohmic Contacts to 6H-SiC by Pulsed Laser Processing
Improved Ohmic Contacts to 6H-SiC by Pulsed Laser Processing
2000
Koichi Nakashima
Osamu Eryu
Shigeharu Ukai
Kohki Yoshida
Masanori Watanabe
Keywords:
Excimer laser
Metallurgy
Tungsten
Pulsed laser
Ohmic contact
Composite material
Materials science
laser processing
Correction
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