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A comparison of A1/si diffusion barriers based on TiN or ZrN
A comparison of A1/si diffusion barriers based on TiN or ZrN
1984
M. Östling
H Norström
Hans-Olof Blom
S. Nygren
P. Wiklund
R. Buchta
Cs Petersson
F Runovic
Keywords:
Tin
Metallurgy
Materials science
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