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PLASMA PARAMETERS AND ACTIVE SPECIES KINETICS IN CF4+C4F8+Ar GAS MIXTURE
PLASMA PARAMETERS AND ACTIVE SPECIES KINETICS IN CF4+C4F8+Ar GAS MIXTURE
2018
Alexander M. Efremov
Dmitriy B. Murin
K-H Kwon
Keywords:
Plasma parameters
Kinetics
Chromatography
Chemistry
Analytical chemistry
Correction
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