Metal-isolator-metal transformer and its manufacturing method

2006 
The present invention relates to a method for manufacturing transformer of metal-insulant-metal. It is applicable to simultaneously form-metal-insulant-metal capacitor and transformer. Said manufacture method includes the following steps: firstly providing a base plate on which a dielectric layer is formed, then forming a patterned first metal layer of metal-insulant-metal capacitor on said base plate, simultaneously forming first metal coil of transformer, then forming an insulating layer for covering base plate, first metal layer and first metal coil, then forming patterned second metal layer or metal-insulant-metal capacitor on the insulating layer, at same time forming second metal coil of transformer.
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