Electrical Properties of Force Feedback Piezoelectric Actuator Using (Na,K)(Nb,Sb)O 3 –(Bi,Na)ZrO 3 Ceramics

In this study, for developing the multilayer piezoelectric actuator, the (Na,K)(Nb,Sb)O3–(Bi,Na)ZrO3 ceramics were manufactured and their dielectric and piezoelectric properties were investigated. The manufactured ceramics showed the excellent physical properties: density = 4.56 g/cm2, kp = 0.47, Qm = 50, er = 1944, and d33 = 313 pC/N, suitable for piezoelectric actuator. The properties of the piezoelectric actuators are as follows: at the average size of 30.47 mm  $$\times$$  17.92 mm  $$\times$$  1.0 mm, resonance frequency fr = 69.87 kHz, anti-resonance frequency fa = 71.20 kHz, kp = 0.22, d33 = 1120 pC/N were appeared, respectively. The three piezoelectric actuators connected in parallel showed the high vibration acceleration of 2.0G at 580 Hz under 70 V, suitable for the force feedback actuator.