Electron-sensitive glass substrate as well as optical circuit and micro structure formed in electron-sensitive glass substrate

The invention relates to an electron-sensitive glass substrate as well as an optical circuit based on the electron-sensitive glass substrate and provided with a plurality of optical waveguides and a micro structure formed in the electron-sensitive glass substrate. The micro structure is formed by irradiating electron beams on a selected area of the electron-sensitive glass and performing high-temperature thermal treatment and chemical etching; and the optical waveguides are formed by irradiating the electron beams on the electron-sensitive glass substrate by virtue of relatively low-temperature thermal treatment.