Nozzle, the cleaning device and a cleaning method

A metal contamination caused by the path internal wall of the nozzle is cut suppresses the occurrence to the cleaning surface of the substrate after cleaning. One aspect of The present invention, in the nozzle (11) for ejecting CO2 particles to the substrate, and characterized in that it is formed a hard film having a Vickers hardness of Hv1000~5000 on the inner wall of the nozzle a nozzle (11) to be.