resonance frequency measurement circuit of nano-resonators

The invention relates to oscillators nanoresonators or NEMS oscillators (from the English "nanoelectromechanical systems", that is to say, nano-electromechanical systems). There is provided a circuit for measuring the oscillation frequency of a resonator (NMS) comprising a first control loop (B1) phase slaving the frequency of a controlled oscillator locked (VCO) to the resonant frequency of the resonator, said first loop comprising a first phase comparator (CMPH1). In addition, a second control loop is provided (B2) that searches for and stores (MEM) loop phase shift introduced by the resonator circuit and its amplification when they are slaved to the resonance by the first loop. The first and second loops operate during a calibration phase. A third loop for self-oscillation (B3) is established during an operating phase. It directly connects the output of the phase shifter controllable at the input of the resonator. The phase shifter receives the phase shift command stored by the second loop.