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Radial Distribution of Plasma Parameters in an Asymmetric Coaxial Capacitive Discharge
Radial Distribution of Plasma Parameters in an Asymmetric Coaxial Capacitive Discharge
2016
Jeremy Peshl
Milka Nikolic
J. Upadhyay
Svetozar Popovic
Lepsha Vuskovic
Keywords:
Capacitive sensing
Coaxial
Analytical chemistry
Plasma parameters
Materials science
capacitive discharge
Mechanics
radial distribution
Correction
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