Old Web
English
Sign In
Acemap
>
Paper
>
Sheet Resistance and Junction Depth Relationships in Implanted Species Diffusion
Sheet Resistance and Junction Depth Relationships in Implanted Species Diffusion
1983
S. Aronowitz
L. Mei
Keywords:
Impurity
Ion implantation
Sheet resistance
Analytical chemistry
Annealing (metallurgy)
Chemistry
Electrical resistivity and conductivity
Surface conductivity
Inorganic chemistry
Silicon
junction depth
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
2
Citations
NaN
KQI
[]