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Laser Displacement Sensor for MEMS to Measure Piconewton Forces (2)
Laser Displacement Sensor for MEMS to Measure Piconewton Forces (2)
2018
Masanobu Shigaki
Yoshito Tanaka
Takaaki Sato
Tsutomu Shimura
Keywords:
Optoelectronics
Laser
Microelectromechanical systems
Materials science
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