Fab-wide equipment monitoring and FDC system

This paper describes development and actual utilization of a fab-wide equipment monitoring system using a secondary port separating a primary port shared by an MES and a fab-wide FDC (fault detection and classification) system. In data collection of equipment parameter, a new concept of important parameter is introduced. As an example of the fab-wide FDC, an FDC of a slurry flow rate fault in CMP equipment from the start-up is demonstrated. Moreover, in order to quantitatively estimate equipment quality, Cpk for each parameter of equipment in fab-wide is calculated and it is confirmed that equipment quality is increasing from starting up equipment.