How to create a pattern inspection data

PROBLEM TO BE SOLVED: To provide a creation method of pattern inspection data used for checking whether shape of a prepared template and a pattern for forming a processed film formed by the template are made correctly based on drawing data of the template. SOLUTION: An outer circumference of patterns of drawing data for forming a template which has a pattern for forming a device pattern having a closed-loop structure connected between ends of patterns forming an adjacent pair of line parts is made to be moved outward/inward by a prescribed amount, and bias data thereby is prepared. Then, the pattern inspection data are created by taking a difference between the two bias data in the case where the outer circumference of the pattern is made to be moved both outward and inward by a prescribed amount, and two bias data are prepared. On the other hand, in the case where the outer circumference of the pattern is made to be moved in one direction outward or inward by a prescribed amount, and one bias data is prepared, the pattern inspection data are created by taking a difference between the bias data and the drawing data of the pattern. COPYRIGHT: (C)2012,JPO&INPIT