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Thermal stability of ALD-grown Ru/HfON/Si capacitors
Thermal stability of ALD-grown Ru/HfON/Si capacitors
2006
H.Tabata H.Tabata
K.Segawa K.Segawa
M. Kadoshima
Y.Nunoshige Y.Nunoshige
A. Ogawa
Toshihide Nabatame
H. Satake
Tomoji Ohishi
A.Toroumi A.Toroumi
Tomoji Oishi
Keywords:
Capacitor
Thermal stability
Inorganic chemistry
Materials science
Chemical engineering
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