Study of deeply buried waveguides: A way towards 3D integration

Abstract Ion-exchange on glass is now a mature integrated optics technology. Indeed, many devices such as wavelength multiplexers, splitters, optical amplifiers, lasers or sensors have been already realized. The challenge now is to integrate all these functions on a single chip. Two different paths can be used to achieve this goal: the first one consists of a reduction of the waveguides’ dimensions by an increase of the refractive index change, whereas the second one, which is addressed in this paper, is based on the realization of multilayered devices. Because ion-exchange on glass allows manufacturing either surface or buried waveguides, this technology is well adapted for 3D integration. However, to realize integrated optical devices with two different layers, it is mandatory to prevent any parasitic light transfer between them. This condition can be fulfilled if the top and bottom waveguides are sufficiently separated. In this article, we present the development of ion-exchanged waveguides deeply buried into a glass substrate and their application to 3D integrated devices. Deeply buried waveguides have been realized by means of a two steps silver–sodium ion-exchange on a dedicated custom made silicate glass. First, a thermal ion-exchange has been carried out at 330 °C during 2 min in a 0.8NaNO 3 –0.2AgNO 3 molten salt in order to create the core of the waveguide. Then, this core has been buried into the glass substrate by applying an electric field of 450 kV/m during 1 h 30 min in a sodium nitrate solution at 260 °C. The obtained waveguide has been measured to be 22 μm under the glass surface. It is singlemode at λ  = 1.55 μm. In order to prove the good isolation between this waveguide and the surface, a top layer has been added to the device by the realization of surface channel waveguides through a thermal ion-exchange performed in a 0.8NaNO 3 –0.2AgNO 3 molten salt at 330 °C during 2 min. The near-field observation of the device output has shown no coupling between the top and bottom layers demonstrating therefore the feasibility of 3D integrated optical devices by means of ion-exchange on glass.