Depth resolved measurements of hydrogen isotope exchange in carbon

Abstract High resolution measurements of the depth profiles of hydrogen and deuterium implanted in carbon were made using SIMS. Nuclear reaction analysis was used to calibrate the concentration scales for the deuterium. The depth profiles of low fluence H and D implants show the D extends to slightly greater depths than the H at 1.5 keV. The retention of deuterium at high fluences was in good agreement with predictions of a saturation model. Depth profiles were also measured on samples implanted with 10 1 8 D/cm 2 at 1.5 keV followed by hydrogen implants of 2 × 10 1 7 H/cm 2 and 10 1 8 H/cm 2 at the same energy. A comparison between these measured profiles and profiles calculated using the local mixing model shows that the model predicts the depth dependence of the H, D exchange reasonably accurately.