Fabrication of Uniform Wrinkled Silica Nanoparticles and Their Application to Abrasives in Chemical Mechanical Planarization

A simple one-pot method is reported for the fabrication of uniform wrinkled silica nanoparticles (WSNs). Rapid cooling of reactants at the appropriate moment during synthesis allowed the separation of nucleation and growth stages, resulting in uniform particles. The factors affecting particle size and interwrinkle distance were also investigated. WSNs with particle sizes of 65–400 nm, interwrinkle distances of 10–33 nm, and surface areas up to 617 m2 g–1 were fabricated. Furthermore, our results demonstrate the advantages of WSNs over comparable nonporous silica nanospheres and fumed silica-based products as an abrasive material in chemical mechanical planarization processes.