Monolithically Integrated MEMS Optical Device with Switching and Attenuating Function

In this paper, a monolithically integrated device composed of optical switch (OS) and variable optical attenuator (VOA) is described. The device shows more functionality and more compactness in the all optical networks. Besides the advantage of wide attenuation range, its fabrication is simple and reliable. In our laboratory, a monolithically integrated optical device has been fabricated and setup for investigation. Experimental results have shown that the proposed approaches improve the compositive performance.