Auger electron spectroscopy analysis of high metal content micro-structures grown by electron beam induced deposition

An auger electron spectroscopy study was carried out on Rh-containing micro-structures grown by electron beam induced deposition (EBID) of the iso-structural and iso-electronic precursors [RhCl(PF3)2]2 and [RhCl(CO)2]2. A material containing between 55 and 60 at.% Rh was obtained from both precursors. The chemical composition of structures grown from the two different precursors indicates a similar decomposition mechanism. Deposits grown from [RhCl(PF3)2]2 showed a chemical composition independent of electron energy and electron dose in the investigated range of conditions.