Micro catalytic methane sensor on bulk quartz substrate

A micro catalytic methane sensor was designed and fabricated on a bulk quartz substrate for the first time to reduce power consumption of the sensor. This sensor was designed using finite element method (FEM) and fabricated on a bulk quartz substrate by two simple MEMS processes, lift off and high resolution screen printing. Local working temperature of the sensor can reach 550°C. Sensitivity of the sensor increases with temperatures changing from 250°C to 470°C, and the highest is 1.52 mV/vol. % CH 4 . At 300°C, sensitivity of this sensor is 0.77 mV / vol. % CH 4 and power consumption of the pellistor pair is about 415 mW.