Multi-Product Reactive Distillation for Silanes Production

Abstract Reactive distillation is the one of the best examples of process intensification. In this paper we present a reactive distillation design for multi-production of silanes based on reactive distillation. Three silane products of interest, dichlorosilane, monochlorosilane, and silane, are to be produced using the same equipment. The design approach used an initial sensitivity analysis to identify key products and sections, followed by simulations to test and validate the designs until desired purities for all products are achieved. The procedure allowed the identification of the operating conditions needed to produce the three silane products. A final design that reached highly purified products is reported.