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Ptychographic Complex Imaging Reflectometry for Spatially-Resolved Dopant Profiling Using a Tabletop EUV Source
Ptychographic Complex Imaging Reflectometry for Spatially-Resolved Dopant Profiling Using a Tabletop EUV Source
2019
Yuka Esashi
Christina L. Porter
Michael Tanksalvala
Galen P. Miley
Naoto Horiguchi
Joshua Knobloch
Jihan Zhou
Robert Karl
Peter Johnsen
Charles Bevis
Bin Wang
Seth L. Cousin
Michael Gerrity
Henry C. Kapteyn
Margaret M. Murnane
Keywords:
Analytical chemistry
Profiling (computer programming)
Dopant
Reflectometry
Optics
Materials science
Extreme ultraviolet lithography
spatially resolved
Correction
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