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Evaluation and Control of Strain in Si Induced by Patterned SiN Stressor
Evaluation and Control of Strain in Si Induced by Patterned SiN Stressor
2008
Hiroyuki Saitoh
Daisuke Kosemura
Yasuto Kakemura
Tetsuya Yoshida
Munehisa Takei
Atsushi Ogura
Tomoyuki Koganezawa
Ichiro Hirosawa
Masayuki Kohno
Tatsuo Nishita
Toshio Nakanishi
Keywords:
Stressor
Strain (chemistry)
Composite material
Materials science
Biophysics
Correction
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