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Epi-ready InP wafers by oxide passivation
Epi-ready InP wafers by oxide passivation
1991
D. Gallet
M. Gendry
G. Hollinger
M. Gauneau
H. L’haridon
D. Lecrosnier
A. Overs
G. Jacob
B. Boudard
Keywords:
Oxide
Nanotechnology
Passivation
Engineering
Wafer
oxide passivation
Correction
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