Measuring head and measuring device for measuring an object by means of interferometric measuring method
2016
The invention relates to a measuring head for measuring an object (30) by means of an interferometric measurement method, wherein the measuring apparatus, optical elements (10, 12a, 12b, 13a, 13b, 16, 16a, 16b), and the optical elements (10, 12a, 12b, 13a, 13b, 16, 16a, 16b) are arranged so that a contiguous segment of the object (30) with at least three independent measuring beams (21, 22, 23) can be optically measured with each of the same optical path length using the same optical path length is given from a reference point from which the at least three independent measuring beams (21, 22, 23) are temporally or spatially separated. The invention further relates to a measuring device comprising such a sensor and an associated method for measuring an object by means of an interferometric measurement method.
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