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Large Format Atomic Layer Deposition
Large Format Atomic Layer Deposition
2010
Ganesh Sundaram
Adam Bertuch
Ritwik Bhatia
Mark J. Dalberth
Eric Deguns
Guo Liu
Mark Sowa
Jill Svenja Becker
Keywords:
Atomic physics
Atomic layer epitaxy
Large format
Atomic layer deposition
Materials science
Optoelectronics
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