The charged particle beam apparatus having the function cancellation mode and enhancements mode

Disclosed is the height and tilt of complex observation conditions of consciousness without observation can advanced observed fine even if you want to viewing conditions while being charged particle beam device can be used easily by beginners, including the sample stage settings for the realization of a charged particle beam device capable. An example constant maintenance of the sample stage height, and horizontal maintenance, as well as extended release to display vertical and horizontal and the operation area moving operation in the rotational direction of the field of view of the sample image on the image display unit of the specimen stage tilt angle mode and operation of the height and tilt angle of the sample stage, and to a charged particle beam apparatus having the extension mode for displaying the vertical and horizontal and the operating area for moving operation in the rotational direction of the field of view of the sample image on the image display unit. For example the extension release mode which can not operate the tilt of the interval and the sample stage between the end portion and the sample stage of the charged particle optical system, the three-dimensional movement, unaugment a function enhanced mode arbitrarily manipulate the tilt and rotation of the sample stage switching can be the operation of the mode and enhancements mode. .The