Piezoelectrically transduced high-Q silica micro resonators

In this paper, we report on high-performance piezoelectric-on-silica micromechanical resonators for integrated timing applications. Fused silica is used as the resonator structural material for its excellent material properties, and thin film aluminum nitride is used as the piezoelectric transduction layer. A silica resonator is demonstrated with a high quality factor (Q U ~25,841), low motional impedance (R m ~350 Ω), and good power handling capability. The measured f×Q product of this resonator is the highest amongst reported micromachined silica/fused quartz resonators.