Secondary Ion Mass Spectrometry

Abstract This chapter provides an introduction in secondary ion mass spectrometry as one of the leading surface chemical analysis and imaging techniques with molecular specificity in the field of material sciences. The physical basics of the technique are explained along with a description of the typical instrumental setups and their modes of operation. The application paragraph specifically focuses on nanoparticle analysis by SIMS in terms of surface spectrometry, imaging, analysis in organic and complex media, and depth profiling. A review of the existing literature is provided, and selected studies are showcased. Limitations and pitfalls as well as current technical developments of SIMS application in nanoparticle surface chemical analysis are equally discussed.