Modified bow-tie antennas AlGaN/GaN FinFETs for sub-THz detection

We investigate the methods of fabrication effective antenna structures for broadband detection by antenna-coupled fin-shaped field-effect transistors (FinFETs) in the terahertz radiation range, using AlGaN/GaN technological process. We demonstrate the efficiency of a split bow-tie antenna solution for a single metal layer design and the way to improve antenna design by FinFET shifting to the middle antenna’s part. Modified bow-tie antennas for FinFETs improve the THz response in the frequency range up to 800 GHz with a maximum of response in the range between 200 GHz and 300 GHz.