Old Web
English
Sign In
Acemap
>
Paper
>
Preparation of TiN by Chemical Vapor Deposition
Preparation of TiN by Chemical Vapor Deposition
1997
Dong-Hyeon Kim
Chang-Hwan Won
Keywords:
Metallurgy
Hybrid physical-chemical vapor deposition
Materials science
Chemical vapor deposition
Ion plating
Combustion chemical vapor deposition
Plasma-enhanced chemical vapor deposition
Plasma processing
Tin
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]