Old Web
English
Sign In
Acemap
>
Paper
>
MoS2 film formation by RF magnetron sputtering for thin film transistors
MoS2 film formation by RF magnetron sputtering for thin film transistors
2016
Ohashi Takumi
Matsuura Kentaro
Ishihara Seiya
Hibino Yusuke
Sawamoto Naomi
Kakushima Kuniyuki
Tsutsui Kazuo
Ogura Atsushi
Wakabayashi Hitoshi
Keywords:
Thin-film transistor
Sputter deposition
Analytical chemistry
Materials science
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
1
Citations
NaN
KQI
[]