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Development of a magnetron sputtering system for in-situ deposition of thin multilayerscoatings.
Development of a magnetron sputtering system for in-situ deposition of thin multilayerscoatings.
2016
M. Salhi
S.E.K. Abaidia
Keywords:
Sputter deposition
High-power impulse magnetron sputtering
Thin film
Materials science
Analytical chemistry
Optoelectronics
In situ
Deposition (law)
Correction
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