Modeling and Compensating of Piezoelectric Actuator Hysteresis in Photolithography

Piezoelectric materials have many advantages, such as: high stiffness, a high frequency response, and high resolution. It has been widely used in reducing vibration system, but hysteresis confines its use. This paper establish model of piezoelectric material's hysteresis at different turning point according to comparability of hysteresis curve. The simulation result's error less than 2 percent contrast to testing data. Piezoelectric materials' output is linear against input controlling by the model.