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MEMS Microphones on InP Substrates for High Performance Digital Ultrasonic Sensors
MEMS Microphones on InP Substrates for High Performance Digital Ultrasonic Sensors
2013
Fujino Shunya
Mizuno Yuta
Takaoka Kazuhiro
Mori Masayuki
Maezawa Koichi
Keywords:
Delta-sigma modulation
Analog-to-digital converter
Microelectromechanical systems
High-electron-mobility transistor
Ultrasonic sensor
Electronic engineering
Electrical engineering
Engineering
condenser microphone
Correction
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