A wavelet-Galerkin method for the simulation of torsion MEMS devices under the effect of squeeze film damping

This paper presents a novel approach of wavelet- Galerkin method applied in the squeeze film damping of a MEMS torsion mirror based on Daubechies wavelet. The general Reynolds equation is modified to a nonlinear equation. Then the damping pressure is expanded by Daubechies wavelet and the coefficient is solved by Galerkin method. The pressure distribution and the frequency response function of the damping are derived. Based on the presented method, an example of the torsion mirror is calculated and the results agree well with the Double sine series method, which have been verified by experiment and numerical calculation. The new method is an effective numerical method to solve the squeeze film air damping of a MEMS torsion mirror.