Development ofanUltra-Small Angular RateSensor ElementwithaLaminated Quartz Tuning Fork

We havedeveloped an ultra-small angular rate sensor element whichwasmanufactured froma laminated quartz wafer. Thequartz tuning forksensor element (1.3 x2.2 x0.24mm3)issosmall thatitcanbeapplied tothe2.5x3.2x 1.3mm3 surface mounttypeangular ratesensor. Thisultra- small angular ratesensor element consisted ofweighted longer armsandawingedbasepartfordamper. According tothe experimental result, itwasconfirmed thatthescale factor was 0.67mV/(deg/s), zeropointvoltage was1.349V andthe maximumangular rate was+/-210deg/s. I. INTRODUCTION