Wavelength modulation over 500 kHz of micromechanically tunable InP-based VCSELs with Si-MEMS technology

Tetsuo Yano,H Saito,Nobuhiko Kanbara,R. Noda,Shin-ichirou Tezuka,Naoyuki Fujimura,Masaya Ooyama,Tetsuya Watanabe,Takaaki Hirata,Nobuhiko Nishiyama

Wavelength modulation over 500 kHz of micromechanically tunable InP-based VCSELs with Si-MEMS technology

2008

Tetsuo Yano
H Saito
Nobuhiko Kanbara
R. Noda
Shin-ichirou Tezuka
Naoyuki Fujimura
Masaya Ooyama
Tetsuya Watanabe
Takaaki Hirata
Nobuhiko Nishiyama

The wavelength modulation over 500 kHz of a micromechanically tunable VCSEL that consists of a InP-based half VCSEL chip and a micromachined SOI chip with a concave movable mirror has been demonstrated for the first time.

Keywords:

500 kHz
Optics
Optoelectronics
Chip
Vertical-cavity surface-emitting laser
Frequency modulation
Silicon on insulator
Physics
Wavelength
Microelectromechanical systems
Modulation
wavelength modulation

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