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Synchronising optical emission spectroscopy to spokes in magnetron sputtering discharges
Synchronising optical emission spectroscopy to spokes in magnetron sputtering discharges
2021
Philipp Alexander Maaß
Volker Schulz-von der Gathen
Achim von Keudell
J. Held
Keywords:
Optoelectronics
Sputter deposition
optical emission spectroscopy
Materials science
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