Thin-film pressure sensor adopting titanium oxynitride as strain material and manufacturing method thereof

Object of the present invention is to disclose a titanium oxynitride film as a pressure sensor and a manufacturing method of a strained material, comprising a flexible stainless steel substrates, the stainless steel core film layer, the core film layer is provided on the elastic substrate includes an insulating layer, the strain resistance layer, electrodes and a temperature measuring resistive layer and the passivation layer, the insulating layer, the strain resistance layer, electrodes and a temperature measuring resistive layer and a passivation layer are sequentially deposited on the flexible stainless steel deposited by vacuum a substrate; compared with the prior art, the use of titanium oxynitride film is used as the strain of the core prepared membrane pressure sensor resistance layer obtained, having a good thermal stability, low production cost and the advantages of high productivity, and at the same temperature and achieve measuring the pressure parameters for use in harsh environments and high temperatures, to achieve the object of the present invention.