Trace-gas Spectroscopy of Methane using a Monolithically Integrated Silicon Photonic Chip Sensor
2019
We present a monolithically integrated photonic sensor incorporating an on-chip III-V laser, detector, sealed reference cell, and sensing waveguide capable of near-infrared absorption spectroscopy of methane near λ = 1651 nm. Sub-100 ppmv∙Hz-1/2 sensitivities are demonstrated.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
4
References
0
Citations
NaN
KQI