Cerium-based abrasive and a method of manufacturing the same

2016 
In the surface polishing of the glass substrate or the like, high polishing rate, moreover, it is possible to suppress the adhesion of the occurrence and the abrasive particles on the surface defects such as scratches and pits in the polishing surface, excellent cerium at low cost and production efficiency providing an abrasive and a manufacturing method thereof. Comprises cubic composite rare earth oxide and complex oxyfluoride rare earth, a total rare earth element containing 95.0 to 99.5 wt% in terms of oxide, the oxide equivalent amount of the total rare earth elements, cerium 54.5 to 95.0 wt% in terms of oxide amount, 4.5 to 45.0 wt% lanthanum in terms of oxide amount, 0.5 to 2.0 wt% neodymium in terms of oxide amount containing and, a fluorine atom containing 0.5 to 4.0 wt%, relative to the oxide equivalent weight of the total rare earth elements, containing sodium atoms from 0.001 to 0.50 wt%, a cerium-based abrasive, and a method of manufacturing the same.
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