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Characterization of eutectic wafer bonding using Gold and Silicon
Characterization of eutectic wafer bonding using Gold and Silicon
2009
Ikusei Rin
Mario Baum
Marco Haubold
Jörg Frömel
Maik Wiemer
Thomas Gessner
Masayoshi Esashi
Keywords:
Composite material
Eutectic system
Silicon
Wafer bonding
characterization
Materials science
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