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Evaluation od ALD Hafnium Silicate and Improvement of Reliability Characteristics
Evaluation od ALD Hafnium Silicate and Improvement of Reliability Characteristics
2005
Ha Jin Lim
Yun-Seok Kim
Hyung-Suk Jung
Sung-Kee Han
M.J. Kim
J.H. Lee
N.I. Lee
Youngsu Chung
H. Y. Kim
N.K. Lee
Sasangan Ramanathan
T. E. Seidel
M. BolesŁawski
Keywords:
Silicate
Hafnium
Inorganic chemistry
Materials science
Chemical engineering
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